The size of the bricks from the "big brother", to the intelligent mobile phone portable multifunctional; from the cumbersome desktop computer, portable computer to plate light, behind these electronic products "downsizing" process are: Micro nanotechnology innovation. Guangdong Institute of Metrology (hereinafter referred to as the Guangdong Provincial Institute of Metrology) by scientific research institute, a variety of micro nano precision analysis instruments to accurate quantity traceability, accurate measurement, micro nano technology provides technical support for international standards.

With the rapid development of science and technology, nanotechnology is widely used in the fields of materials, chemistry, biology, energy and medicine and health, and has an important position and broad market prospect. The main research of nanotechnology is to study, discover and process materials, devices and systems with structures smaller than 100nm in order to obtain the required functions and performances.

With the development of nanotechnology and micro processing, the measurement of micro and nano scale products is becoming more and more urgent and the demand is increasing gradually. In order to solve the problem of quantity dissemination, Guangdong Provincial Institute of Metrology by taking quality inspection administration research project "micro nano film thickness traceability and film thickness measuring instrument calibration technology" and the Provincial Department of science and technology research project "micro nano scale thin film step sample thickness and the quantity transfer system research, successfully developed a micro nano linewidth the standard model, step height standard, nanometer film thickness standard samples. The research results can be used for the calibration of scanning electron microscope (SEM), scanning probe microscope and X ray fluorescence thickness gauge. On this basis, Guangdong metrology institute took the lead in the domestic establishment of X ray fluorescence scanning probe microscope, thickness gauge calibration two regional measurement standards, basically solve the Southern China area this kind of micro nano scale instrument quantity dissemination problem.

In order to promote the micro nanotechnology level with the international standards, the Guangdong Provincial Institute of Metrology in the national science and technology support program technology measurement standard and standard of "micro research, assist the National Metrology Institute of metrological scanning electron microscope and double probe scanning probe microscope standard measuring device, for the first time in China to achieve measurement results of scanning electron microscope direct traceability to the international definition of metre laser wavelength standard, at the same time using double probe measurement model, measuring blind area breakthrough probe microscope, realize the accurate measurement of true 3D nanostructures.

At present, the scanning electron microscope, the Guangdong Provincial Institute of metrology calibration X ray fluorescence thickness gauge and other high-end analytical instruments, for the Southern China region of microelectronics, ultra precision machining, new materials and automobile manufacturing industry total more than 150 enterprises with the transformation and upgrading of the quantity traceability support, boost industrial restructuring and upgrading. For example, the state-level high-tech enterprises, Shenzhen Huaxing photoelectric display in the LCD panel development process, there are problems such as uncertainty in the value of precision components, has not been successful. Guangdong Institute of metrology to calibrate and trace its micro analytical instruments, ensure the accurate and reliable measurement results, and promote the development of high-end LCD panel.